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Aktuelle Version vom 1. Oktober 2022, 10:15 Uhr
408 High power impulse plasmas for thin film deposition (Wird im WS 2022/23 nicht angeboten)
The Electrostatic Quadrupole Plasma (EQP) Mass Spectrometer is an experimental instrument used to measure the ion energy distribution function of atoms and ions in the plasma and to perform the mass analysis of the plasma. In this practical course the student will investigate the ion energy distribution function (IEDF) of metal and Ar atoms in High power impulse magnetron sputtering (HIPIMS) plasma discharge.
